繁體


主要業務

POU廢氣處理系統

技術|Heat - Wet Type

MODEL

508 BWA

CAPACITY

500slm

APPLICATION

HDP, SA, PE, Furnace, IIP

MODEL

1208 BWA

CAPACITY

1000slm

APPLICATION

W-CVD,
W-Six,Poly,LCD

MODEL

Mi2000 BW

CAPACITY

3500slm

APPLICATION

MO,EPI,7G LCD

MODEL

Mi2500 BW

CAPACITY

4000slm

APPLICATION

MO,EPI,8G LCD~

技術|Wet - Plasma - Wet Type

MODEL

601WPW

CAPACITY

500slm

APPLICATION

Etch,PFCs Treatment

技術|FCTO Type

MODEL

700W

CAPACITY

500slm

APPLICATION

HDP,PE-CVD,
Furnace,Diff,ALD,
Semiconductor

MODEL

2001W

CAPACITY

2000slm

APPLICATION

ALD,AMOLED.LCD

技術|Burn - Wet Type

MODEL

651FW

CAPACITY

500slm

APPLICATION

PE-CVD,PFCs Treatment

技術|Wet Type

MODEL

502W / 505W

CAPACITY

500slm

APPLICATION

Metal Etch/Epi

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