MODEL

508 BWA

CAPACITY

500slm

APPLICATION

HDP, SA, PE, Furnace, IIP

MODEL

1208 BWA

CAPACITY

1000slm

APPLICATION

W-CVD,
W-Six,Poly,LCD

MODEL

Mi2000 BW

CAPACITY

3500slm

APPLICATION

MO,EPI,7G LCD

MODEL

Mi2500 BW

CAPACITY

4000slm

APPLICATION

MO,EPI,8G LCD~

MODEL

601WPW

CAPACITY

500slm

APPLICATION

Etch,PFCs Treatment

MODEL

700W

CAPACITY

500slm

APPLICATION

HDP,PE-CVD,
Furnace,Diff,ALD,
Semiconductor

MODEL

2001W

CAPACITY

2000slm

APPLICATION

ALD,AMOLED.LCD

MODEL

651FW

CAPACITY

500slm

APPLICATION

PE-CVD,PFCs Treatment

MODEL

502W / 505W

CAPACITY

500slm

APPLICATION

Metal Etch/Epi