PRODUCTS

POU Abatment System

Technology|Heat - Wet Type

MODEL

508 BWA

CAPACITY

500slm

APPLICATION

HDP, SA, PE, Furnace, IIP

MODEL

1208 BWA

CAPACITY

1000slm

APPLICATION

W-CVD,
W-Six,Poly,LCD

MODEL

Mi2000 BW

CAPACITY

3500slm

APPLICATION

MO,EPI,7G LCD

MODEL

Mi2500 BW

CAPACITY

4000slm

APPLICATION

MO,EPI,8G LCD~

Technology|Wet - Plasma - Wet Type

MODEL

601WPW

CAPACITY

500slm

APPLICATION

Etch,PFCs Treatment

Technology|FCTO Type

MODEL

700W

CAPACITY

500slm

APPLICATION

HDP,PE-CVD,
Furnace,Diff,ALD,
Semiconductor

MODEL

2001W

CAPACITY

2000slm

APPLICATION

ALD,AMOLED.LCD

Technology|Burn - Wet Type

MODEL

651FW

CAPACITY

500slm

APPLICATION

PE-CVD,PFCs Treatment

Technology|Wet Type

MODEL

502W / 505W

CAPACITY

500slm

APPLICATION

Metal Etch/Epi

Please contact us or "On-Line Inquires" for detailed specifications.

ADD:Rm. B, 5F., No.158, Xianzheng 13th Rd., Zhubei City, Hsinchu County 302, Taiwan (R.O.C.) / TEL:+886-3-6573-801 / FAX:+886-3-6573-802 / E-MAIL:chloe@mattw.com.tw
© 2018 MAT TAIWAN CO., LTD.. ALL RIGHTS RESERVED.